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Prior to the deposition in the Er:Al2O3 active materials, the coupling circuit, i.e., the strip waveguides, the method changeover tapers and also the method converters have been included using a 800 nm thick layer of hydrogen silsesquioxane (HSQ, n ~1.forty five) to avoid their coating Together with the active substance, as proven in Fig. 1. The HSQ cladding was deposited by spin coating and a further lithography phase was done to variety openings for your slot waveguides. The HSQ-lined waveguide chip was then coated which has a one hundred fifty nm thick layer of Er:Al2O3 by sequentially depositing Er2O3 and Al2O3 onto the waveguide chip with ALD. Over the ALD-system, the Er:Al2O3 layer grows uniformly and conformally on the single-manner slot waveguides in addition to about the HSQ-protected coupling circuits. However, the proposed design and style permits the propagating manner to connect with the get layer only in The one-manner slot waveguides where the HSQ cladding is absent (as shown by Fig. 1). We selected atomic-layer-deposited Er:Al2O3 as the acquire materials since it not just displays considered one of the best photoluminescence life time-density products and solutions (see Supplementary Table one in Supplementary Take note one), but can also be processed at comparatively reduced substrate temperatures (250–325 °C)18.

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